A synchrotron-based kilowatt-level radiation source for EUV lithography.
Jiang B, Feng C, Li C, Bai Z, Wan W, Xiang D, Gu Q, Wang K, Zhang Q, Huang D, Chen S.
Jiang B, et al. Among authors: wang k.
Sci Rep. 2022 Feb 28;12(1):3325. doi: 10.1038/s41598-022-07323-z.
Sci Rep. 2022.
PMID: 35228673
Free PMC article.