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Imaging Structure and Composition Homogeneity of 300 mm SiGe Virtual Substrates for Advanced CMOS Applications by Scanning X-ray Diffraction Microscopy.
Zoellner MH, Richard MI, Chahine GA, Zaumseil P, Reich C, Capellini G, Montalenti F, Marzegalli A, Xie YH, Schülli TU, Häberlen M, Storck P, Schroeder T. Zoellner MH, et al. Among authors: schroeder t. ACS Appl Mater Interfaces. 2015 May 6;7(17):9031-7. doi: 10.1021/am508968b. Epub 2015 Apr 28. ACS Appl Mater Interfaces. 2015. PMID: 25871429 Free article.
1,495 results