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Stacked Integration of MEMS on LSI.
Esashi M, Tanaka S. Esashi M, et al. Among authors: tanaka s. Micromachines (Basel). 2016 Aug 5;7(8):137. doi: 10.3390/mi7080137. Micromachines (Basel). 2016. PMID: 30404308 Free PMC article.
Electroplated Al Press Marking for Wafer-Level Bonding.
Al Farisi MS, Tsukamoto T, Tanaka S. Al Farisi MS, et al. Among authors: tanaka s. Micromachines (Basel). 2022 Jul 30;13(8):1221. doi: 10.3390/mi13081221. Micromachines (Basel). 2022. PMID: 36014143 Free PMC article.
Maximum accuracy evaluation scheme for wireless saw delay-line sensors.
Kuypers JH, Reindl LM, Tanaka S, Esashi M. Kuypers JH, et al. Among authors: tanaka s. IEEE Trans Ultrason Ferroelectr Freq Control. 2008 Jul;55(7):1640-52. doi: 10.1109/TUFFC.2008.840. IEEE Trans Ultrason Ferroelectr Freq Control. 2008. PMID: 18986954
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