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Optimized highly efficient multilayer-coated blazed gratings for the tender X-ray region.
Sokolov A, Huang Q, Senf F, Feng J, Lemke S, Alimov S, Knedel J, Zeschke T, Kutz O, Seliger T, Gwalt G, Schäfers F, Siewert F, Kozhevnikov IV, Qi R, Zhang Z, Li W, Wang Z. Sokolov A, et al. Among authors: schafers f. Opt Express. 2019 Jun 10;27(12):16833-16846. doi: 10.1364/OE.27.016833. Opt Express. 2019. PMID: 31252903 Free article.
Highly efficient blazed grating with multilayer coating for tender X-ray energies.
Senf F, Bijkerk F, Eggenstein F, Gwalt G, Huang Q, Kruijs R, Kutz O, Lemke S, Louis E, Mertin M, Packe I, Rudolph I, Schäfers F, Siewert F, Sokolov A, Sturm JM, Waberski Ch, Wang Z, Wolf J, Zeschke T, Erko A. Senf F, et al. Among authors: schafers f. Opt Express. 2016 Jun 13;24(12):13220-30. doi: 10.1364/OE.24.013220. Opt Express. 2016. PMID: 27410339 Free article.
Gratings for synchrotron and FEL beamlines: a project for the manufacture of ultra-precise gratings at Helmholtz Zentrum Berlin.
Siewert F, Löchel B, Buchheim J, Eggenstein F, Firsov A, Gwalt G, Kutz O, Lemke S, Nelles B, Rudolph I, Schäfers F, Seliger T, Senf F, Sokolov A, Waberski C, Wolf J, Zeschke T, Zizak I, Follath R, Arnold T, Frost F, Pietag F, Erko A. Siewert F, et al. Among authors: schafers f. J Synchrotron Radiat. 2018 Jan 1;25(Pt 1):91-99. doi: 10.1107/S1600577517015600. Epub 2018 Jan 1. J Synchrotron Radiat. 2018. PMID: 29271757 Free PMC article.
Soft x-ray reflectometry, hard x-ray photoelectron spectroscopy and transmission electron microscopy investigations of the internal structure of TiO2(Ti)/SiO2/Si stacks.
Filatova EO, Kozhevnikov IV, Sokolov AA, Ubyivovk EV, Yulin S, Gorgoi M, Schäfers F. Filatova EO, et al. Among authors: schafers f. Sci Technol Adv Mater. 2012 Feb 2;13(1):015001. doi: 10.1088/1468-6996/13/1/015001. eCollection 2012 Feb. Sci Technol Adv Mater. 2012. PMID: 27877468 Free PMC article.
At-wavelength metrology facility for soft X-ray reflection optics.
Sokolov A, Bischoff P, Eggenstein F, Erko A, Gaupp A, Künstner S, Mast M, Schmidt JS, Senf F, Siewert F, Zeschke T, Schäfers F. Sokolov A, et al. Among authors: schafers f. Rev Sci Instrum. 2016 May;87(5):052005. doi: 10.1063/1.4950731. Rev Sci Instrum. 2016. PMID: 27250385
Influence of barrier interlayers on the performance of Mo/Be multilayer mirrors for next-generation EUV lithography.
Svechnikov MV, Chkhalo NI, Gusev SA, Nechay AN, Pariev DE, Pestov AE, Polkovnikov VN, Tatarskiy DA, Salashchenko NN, Schäfers F, Sertsu MG, Sokolov A, Vainer YA, Zorina MV. Svechnikov MV, et al. Among authors: schafers f. Opt Express. 2018 Dec 24;26(26):33718-33731. doi: 10.1364/OE.26.033718. Opt Express. 2018. PMID: 30650805 Free article.
Broad angular multilayer analyzer for soft X-rays.
Wang ZS, Wang HC, Zhu JT, Wang FL, Gu ZX, Chen LY, Michette AG, Powell AK, Pfauntsch SJ, Schäfers F. Wang ZS, et al. Among authors: schafers f. Opt Express. 2006 Mar 20;14(6):2533-8. doi: 10.1364/oe.14.002533. Opt Express. 2006. PMID: 19503592 Free article.
57 results