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Long Slender Piezo-Resistive Silicon Microprobes for Fast Measurements of Roughness and Mechanical Properties inside Micro-Holes with Diameters below 100 µm.
Brand U, Xu M, Doering L, Langfahl-Klabes J, Behle H, Bütefisch S, Ahbe T, Peiner E, Völlmeke S, Frank T, Mickan B, Kiselev I, Hauptmannl M, Drexel M. Brand U, et al. Among authors: peiner e. Sensors (Basel). 2019 Mar 22;19(6):1410. doi: 10.3390/s19061410. Sensors (Basel). 2019. PMID: 30909410 Free PMC article.
Cantilever Sensors.
Peiner E, Wasisto HS. Peiner E, et al. Sensors (Basel). 2019 May 1;19(9):2043. doi: 10.3390/s19092043. Sensors (Basel). 2019. PMID: 31052400 Free PMC article.
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