Cantilever Sensors

Sensors (Basel). 2019 May 1;19(9):2043. doi: 10.3390/s19092043.

Erwin Peiner^{1

2}, Hutomo Suryo Wasisto^{3

4}

¹ Institute of Semiconductor Technology (IHT), Technische Universität Braunschweig, Hans-Sommer-Straße 66, D-38106 Braunschweig, Germany. e.peiner@tu-bs.de.
² Laboratory for Emerging Nanometrology (LENA), Technische Universität Braunschweig, Langer Kamp 6a/b, D-38106 Braunschweig, Germany. e.peiner@tu-bs.de.
³ Institute of Semiconductor Technology (IHT), Technische Universität Braunschweig, Hans-Sommer-Straße 66, D-38106 Braunschweig, Germany. h.wasisto@tu-braunschweig.de.
⁴ Laboratory for Emerging Nanometrology (LENA), Technische Universität Braunschweig, Langer Kamp 6a/b, D-38106 Braunschweig, Germany. h.wasisto@tu-braunschweig.de.

Abstract

A cantilever is considered the most basic mechanical spring-mass system and has enormous application potential for sensors [...].