High-aperture EUV microscope using multilayer mirrors and a 3D reconstruction algorithm based on z-tomography.
Malyshev IV, Reunov DG, Chkhalo NI, Toropov MN, Pestov AE, Polkovnikov VN, Tsybin NN, Lopatin AY, Chernyshev AK, Mikhailenko MS, Smertin RM, Pleshkov RS, Shirokova OM.
Malyshev IV, et al. Among authors: mikhailenko ms.
Opt Express. 2022 Dec 19;30(26):47567-47586. doi: 10.1364/OE.475032.
Opt Express. 2022.
PMID: 36558683
Free article.