Soft X-ray varied-line-spacing gratings fabricated by near-field holography using an electron beam lithography-written phase mask.
Lin D, Liu Z, Dietrich K, Sokolov A, Sertsu MG, Zhou H, Huo T, Kroker S, Chen H, Qiu K, Xu X, Schäfers F, Liu Y, Kley EB, Hong Y.
Lin D, et al. Among authors: hong y.
J Synchrotron Radiat. 2019 Sep 1;26(Pt 5):1782-1789. doi: 10.1107/S1600577519008245. Epub 2019 Aug 16.
J Synchrotron Radiat. 2019.
PMID: 31490170
Free PMC article.