Anti-stiction coating for mechanically tunable photonic crystal devices.
Petruzzella M, Zobenica Ž, Cotrufo M, Zardetto V, Mameli A, Pagliano F, Koelling S, van Otten FWM, Roozeboom F, Kessels WMM, van der Heijden RW, Fiore A.
Petruzzella M, et al. Among authors: fiore a.
Opt Express. 2018 Feb 19;26(4):3882-3891. doi: 10.1364/OE.26.003882.
Opt Express. 2018.
PMID: 29475245
Free article.