Demonstration of atomic force microscopy imaging using an integrated opto-electro-mechanical transducer

Federico Galeotti; Gustav Lindgren; Maurangelo Petruzzella; Frank W M van Otten; Hamed Sadeghian Marnani; Abbas Mohtashami; Rob van der Heijden; Andrea Fiore

doi:10.1016/j.ultramic.2021.113368

Demonstration of atomic force microscopy imaging using an integrated opto-electro-mechanical transducer

Ultramicroscopy. 2021 Nov:230:113368. doi: 10.1016/j.ultramic.2021.113368. Epub 2021 Aug 15.

Authors

Federico Galeotti¹, Gustav Lindgren², Maurangelo Petruzzella², Frank W M van Otten², Hamed Sadeghian Marnani³, Abbas Mohtashami⁴, Rob van der Heijden², Andrea Fiore²

Affiliations

¹ Department of Applied Physics and Institute for Photonic Integration, Eindhoven University of Technology, Eindhoven, the Netherlands. Electronic address: f.galeotti@tue.nl.
² Department of Applied Physics and Institute for Photonic Integration, Eindhoven University of Technology, Eindhoven, the Netherlands.
³ Department of Mechanical Engineering, Eindhoven University of Technology, Eindhoven, the Netherlands.
⁴ Nano-Opto-Mechanical Instruments, Dept. of Optomechatronics, Netherlands Organisation for Applied Scientic Research TNO, Delft, the Netherlands.

PMID: 34492425
DOI: 10.1016/j.ultramic.2021.113368

Abstract

The low throughput of atomic force microscopy (AFM) is the main drawback in its large-scale deployment in industrial metrology. A promising solution would be based on the parallelization of the scanning probe system, allowing acquisition of the image by an array of probes operating simultaneously. A key step for reaching this goal relies on the miniaturization and integration of the sensing mechanism. Here, we demonstrate AFM imaging employing an on-chip displacement sensor, based on a photonic crystal cavity, combined with an integrated photodetector and coupled to an on-chip waveguide. This fully-integrated sensor allows high-sensitivity and high-resolution in a very small footprint and its readout is compatible with current commercial AFM systems.

Keywords: AFM; Integrated displacement sensor; Opto-electro-mechanics; Photonic crystal.