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Multi-silicon ridge nanofabrication by repeated edge lithography.
Zhao Y, Berenschot E, Jansen H, Tas N, Huskens J, Elwenspoek M. Zhao Y, et al. Nanotechnology. 2009 Aug 5;20(31):315305. doi: 10.1088/0957-4484/20/31/315305. Epub 2009 Jul 13. Nanotechnology. 2009. PMID: 19597243 Free article.
3D nanofabrication of fluidic components by corner lithography.
Berenschot EJ, Burouni N, Schurink B, van Honschoten JW, Sanders RG, Truckenmuller R, Jansen HV, Elwenspoek MC, van Apeldoorn AA, Tas NR. Berenschot EJ, et al. Small. 2012 Dec 21;8(24):3823-31. doi: 10.1002/smll.201201446. Epub 2012 Aug 21. Small. 2012. PMID: 22907803
Three-Dimensional Fractal Geometry for Gas Permeation in Microchannels.
Malankowska M, Schlautmann S, Berenschot EJW, Tiggelaar RM, Pina MP, Mallada R, Tas NR, Gardeniers H. Malankowska M, et al. Among authors: berenschot ejw. Micromachines (Basel). 2018 Jan 27;9(2):45. doi: 10.3390/mi9020045. Micromachines (Basel). 2018. PMID: 30393321 Free PMC article.
31 results