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Cost-Efficient Wafer-Level Capping for MEMS and Imaging Sensors by Adhesive Wafer Bonding.
Micromachines (Basel). 2016 Oct 18;7(10):192. doi: 10.3390/mi7100192.
Micromachines (Basel). 2016.
PMID: 30404365
Free PMC article.
Scalable Manufacturing of Nanogaps.
Dubois V, Bleiker SJ, Stemme G, Niklaus F.
Dubois V, et al. Among authors: bleiker sj.
Adv Mater. 2018 Nov;30(46):e1801124. doi: 10.1002/adma.201801124. Epub 2018 Aug 29.
Adv Mater. 2018.
PMID: 30156331
Review.
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Nanoelectromechanical relay without pull-in instability for high-temperature non-volatile memory.
Rana S, Mouro J, Bleiker SJ, Reynolds JD, Chong HMH, Niklaus F, Pamunuwa D.
Rana S, et al. Among authors: bleiker sj.
Nat Commun. 2020 Mar 4;11(1):1181. doi: 10.1038/s41467-020-14872-2.
Nat Commun. 2020.
PMID: 32132542
Free PMC article.
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Integrated silicon photonic MEMS.
Quack N, Takabayashi AY, Sattari H, Edinger P, Jo G, Bleiker SJ, Errando-Herranz C, Gylfason KB, Niklaus F, Khan U, Verheyen P, Mallik AK, Lee JS, Jezzini M, Morrissey P, Antony C, O'Brien P, Bogaerts W.
Quack N, et al. Among authors: bleiker sj.
Microsyst Nanoeng. 2023 Mar 20;9:27. doi: 10.1038/s41378-023-00498-z. eCollection 2023.
Microsyst Nanoeng. 2023.
PMID: 36949734
Free PMC article.
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Integrated 4-terminal single-contact nanoelectromechanical relays implemented in a silicon-on-insulator foundry process.
Li Y, Worsey E, Bleiker SJ, Edinger P, Kulsreshath MK, Tang Q, Takabayashi AY, Quack N, Verheyen P, Bogaerts W, Gylfason KB, Pamunuwa D, Niklaus F.
Li Y, et al. Among authors: bleiker sj.
Nanoscale. 2023 Nov 9;15(43):17335-17341. doi: 10.1039/d3nr03429a.
Nanoscale. 2023.
PMID: 37856244
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Correction: Integrated 4-terminal single-contact nanoelectromechanical relays implemented in a silicon-on-insulator foundry process.
Li Y, Worsey E, Bleiker SJ, Edinger P, Kulsreshath MK, Tang Q, Takabayashi AY, Quack N, Verheyen P, Bogaerts W, Gylfason KB, Pamunuwa D, Niklaus F.
Li Y, et al. Among authors: bleiker sj.
Nanoscale. 2023 Nov 30;15(46):18940. doi: 10.1039/d3nr90214e.
Nanoscale. 2023.
PMID: 37965952
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Correction: Integrated silicon photonic MEMS.
Quack N, Takabayashi AY, Sattari H, Edinger P, Jo G, Bleiker SJ, Errando-Herranz C, Gylfason KB, Niklaus F, Khan U, Verheyen P, Mallik AK, Lee JS, Jezzini M, Zand I, Morrissey P, Antony C, O'Brien P, Bogaerts W.
Quack N, et al. Among authors: bleiker sj.
Microsyst Nanoeng. 2024 Jan 24;10:17. doi: 10.1038/s41378-023-00649-2. eCollection 2024.
Microsyst Nanoeng. 2024.
PMID: 38268775
Free PMC article.
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Vacuum-sealed silicon photonic MEMS tunable ring resonator with an independent control over coupling and phase.
Edinger P, Jo G, Van Nguyen CP, Takabayashi AY, Errando-Herranz C, Antony C, Talli G, Verheyen P, Khan U, Bleiker SJ, Bogaerts W, Quack N, Niklaus F, Gylfason KB.
Edinger P, et al. Among authors: bleiker sj.
Opt Express. 2023 Feb 13;31(4):6540-6551. doi: 10.1364/OE.480219.
Opt Express. 2023.
PMID: 36823907
Free article.
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