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Speciation of BC(x)N(y) films grown by PECVD with trimethylborazine precursor.
Baake O, Hoffmann PS, Klein A, Pollakowski B, Beckhoff B, Kosinova ML, Fainer NI, Sulyaeva VS, Trunova VA, Ensinger W. Baake O, et al. Among authors: hoffmann ps. Anal Bioanal Chem. 2009 Nov;395(6):1901-9. doi: 10.1007/s00216-009-3056-6. Anal Bioanal Chem. 2009. PMID: 19714320
Nondestructive characterization of nanoscale layered samples.
Baake O, Hoffmann PS, Flege S, Ortner HM, Gottschalk S, Berky W, Balogh AG, Ensinger W, Beckhoff B, Kolbe M, Gerlach M, Pollakowski B, Weser J, Ulm G, Haschke M, Blokhina E, Peter M, Porta D, Heck M. Baake O, et al. Among authors: hoffmann ps. Anal Bioanal Chem. 2009 Jan;393(2):623-34. doi: 10.1007/s00216-008-2465-2. Epub 2008 Nov 8. Anal Bioanal Chem. 2009. PMID: 18998118
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