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Development of interdigital transducer sensors for non-destructive characterization of thin films using high frequency Rayleigh waves.
Rev Sci Instrum. 2011 Jun;82(6):064905. doi: 10.1063/1.3600797.
Rev Sci Instrum. 2011.
PMID: 21721722
Characterization of micrometric and superficial residual stresses using high frequency surface acoustic waves generated by interdigital transducers.
Duquennoy M, Ouaftouh M, Deboucq J, Lefebvre JE, Jenot F, Ourak M.
Duquennoy M, et al. Among authors: deboucq j.
J Acoust Soc Am. 2013 Dec;134(6):4360. doi: 10.1121/1.4826176.
J Acoust Soc Am. 2013.
PMID: 25669247
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