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Plasma Enhanced High-Rate Deposition of Advanced Film Materials by Metal Reactive Evaporation in Organosilicon Vapors.
Membranes (Basel). 2023 Mar 24;13(4):374. doi: 10.3390/membranes13040374.
Membranes (Basel). 2023.
PMID: 37103801
Free PMC article.
Synthesis of Nanocomposite TiSiCN Coatings by Titanium Evaporation and Organosilicon Compound Activation in Hollow Cathode Arc Discharge.
Menshakov AI, Bruhanova YA, Kukharenko AI, Zhidkov IS.
Menshakov AI, et al.
Membranes (Basel). 2022 Mar 12;12(3):321. doi: 10.3390/membranes12030321.
Membranes (Basel). 2022.
PMID: 35323796
Free PMC article.
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