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Study on the Deposition Uniformity of Triple-Target Magnetron Co-Sputtering System: Numerical Simulation and Experiment.
Materials (Basel). 2022 Nov 4;15(21):7770. doi: 10.3390/ma15217770.
Materials (Basel). 2022.
PMID: 36363362
Free PMC article.
Influence of Target-Substrate Distance on the Transport Process of Sputtered Atoms: MC-MD Multiscale Coupling Simulation.
Zhu G, Du Q, Xiao B, Chen G, Gan Z.
Zhu G, et al.
Materials (Basel). 2022 Dec 13;15(24):8904. doi: 10.3390/ma15248904.
Materials (Basel). 2022.
PMID: 36556710
Free PMC article.
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