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Table representation of search results timeline featuring number of search results per year.
Year | Number of Results |
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2022 | 2 |
2023 | 1 |
2024 | 0 |
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Influence of Target-Substrate Distance on the Transport Process of Sputtered Atoms: MC-MD Multiscale Coupling Simulation.
Materials (Basel). 2022 Dec 13;15(24):8904. doi: 10.3390/ma15248904.
Materials (Basel). 2022.
PMID: 36556710
Free PMC article.
Study on the Deposition Uniformity of Triple-Target Magnetron Co-Sputtering System: Numerical Simulation and Experiment.
Zhu G, Xiao B, Chen G, Gan Z.
Zhu G, et al.
Materials (Basel). 2022 Nov 4;15(21):7770. doi: 10.3390/ma15217770.
Materials (Basel). 2022.
PMID: 36363362
Free PMC article.
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On the Microcrystal Structure of Sputtered Cu Films Deposited on Si(100) Surfaces: Experiment and Integrated Multiscale Simulation.
Zhu G, Han M, Xiao B, Gan Z.
Zhu G, et al.
Molecules. 2023 Jun 15;28(12):4786. doi: 10.3390/molecules28124786.
Molecules. 2023.
PMID: 37375341
Free PMC article.
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