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Development of a machine for automatically measuring static/dynamic running parallelism in linear guideways.
Rev Sci Instrum. 2014 Mar;85(3):035115. doi: 10.1063/1.4868682.
Rev Sci Instrum. 2014.
PMID: 24689628
Note: Development of a high resolution six-degrees-of-freedom optical vibrometer for precision stage.
Hsieh TH, Jywe WY, Chen SL, Liu CH, Huang HL.
Hsieh TH, et al.
Rev Sci Instrum. 2011 May;82(5):056101. doi: 10.1063/1.3585021.
Rev Sci Instrum. 2011.
PMID: 21639549
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