Note: Development of a high resolution six-degrees-of-freedom optical vibrometer for precision stage

Tung Hsien Hsieh; Wen Yuh Jywe; Shang Liang Chen; Chien Hung Liu; Hsueh Liang Huang

doi:10.1063/1.3585021

Note: Development of a high resolution six-degrees-of-freedom optical vibrometer for precision stage

Rev Sci Instrum. 2011 May;82(5):056101. doi: 10.1063/1.3585021.

Authors

Tung Hsien Hsieh¹, Wen Yuh Jywe, Shang Liang Chen, Chien Hung Liu, Hsueh Liang Huang

Affiliation

¹ Institute of Manufacturing Information and Systems, National Cheng Kung University, Tainan 701, Taiwan. a58503147@yahoo.com.tw

PMID: 21639549
DOI: 10.1063/1.3585021

Abstract

A high resolution six degrees of freedom (6-DOF) optical vibrometer is proposed. 6-DOF vibrations can be simultaneously measured using the proposed optical vibrometer, which reduces measurement time and number. The performance of the proposed vibrometer is verified by experiments. The results show that the accuracy of the proposed optical vibrometer is ±30 nm∕200 nm and ±0.04 arcsec∕0.1 arcsec at 1000 Hz.