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High-resolution MEMS inertial sensor combining large-displacement buckling behaviour with integrated capacitive readout.
Microsyst Nanoeng. 2019 Dec 16;5:60. doi: 10.1038/s41378-019-0105-y. eCollection 2019.
Microsyst Nanoeng. 2019.
PMID: 34567613
Free PMC article.
Maintaining Transparency of a Heated MEMS Membrane for Enabling Long-Term Optical Measurements on Soot-Containing Exhaust Gas.
Middelburg LM, Ghaderi M, Bilby D, Visser JH, Zhang GQ, Lundgren P, Enoksson P, Wolffenbuttel RF.
Middelburg LM, et al.
Sensors (Basel). 2019 Dec 18;20(1):3. doi: 10.3390/s20010003.
Sensors (Basel). 2019.
PMID: 31861255
Free PMC article.
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Integrated 64 pixel UV image sensor and readout in a silicon carbide CMOS technology.
Romijn J, Vollebregt S, Middelburg LM, Mansouri BE, van Zeijl HW, May A, Erlbacher T, Leijtens J, Zhang G, Sarro PM.
Romijn J, et al. Among authors: middelburg lm.
Microsyst Nanoeng. 2022 Oct 25;8:114. doi: 10.1038/s41378-022-00446-3. eCollection 2022.
Microsyst Nanoeng. 2022.
PMID: 36304906
Free PMC article.
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