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Tailoring the Hybrid Magnetron Sputtering Process (HiPIMS and dcMS) to Manufacture Ceramic Multilayers: Powering Conditions, Target Materials, and Base Layers.
Nanomaterials (Basel). 2022 Jul 18;12(14):2465. doi: 10.3390/nano12142465.
Nanomaterials (Basel). 2022.
PMID: 35889689
Free PMC article.
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