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Deep multilevel wet etching of fused silica glass microstructures in BOE solution.
Konstantinova TG, Andronic MM, Baklykov DA, Stukalova VE, Ezenkova DA, Zikiy EV, Bashinova MV, Solovev AA, Lotkov ES, Ryzhikov IA, Rodionov IA. Konstantinova TG, et al. Among authors: zikiy ev. Sci Rep. 2023 Mar 30;13(1):5228. doi: 10.1038/s41598-023-32503-w. Sci Rep. 2023. PMID: 36997654 Free PMC article.