CMOS-compatible all-Si metasurface polarizing bandpass filters on 12-inch wafers.
Xu Z, Dong Y, Tseng CK, Hu T, Tong J, Zhong Q, Li N, Sim L, Lai KH, Lin Y, Li D, Li Y, Bliznetsov V, Fu YH, Zhu S, Lin Q, Zhang DH, Gu Y, Singh N, Kwong DL.
Xu Z, et al. Among authors: zhang dh.
Opt Express. 2019 Sep 2;27(18):26060-26069. doi: 10.1364/OE.27.026060.
Opt Express. 2019.
PMID: 31510466
Free article.