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Study of Si and Ge Atoms Termination Using H-Dilution in SiGe:H Alloys Deposited by Radio Frequency (13.56 MHz) Plasma Discharge at Low Temperature.
Materials (Basel). 2020 Feb 26;13(5):1045. doi: 10.3390/ma13051045.
Materials (Basel). 2020.
PMID: 32110866
Free PMC article.
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