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High-Quality Amorphous Silicon Carbide for Hybrid Photonic Integration Deposited at a Low Temperature.
Lopez-Rodriguez B, van der Kolk R, Aggarwal S, Sharma N, Li Z, van der Plaats D, Scholte T, Chang J, Gröblacher S, Pereira SF, Bhaskaran H, Zadeh IE. Lopez-Rodriguez B, et al. Among authors: zadeh ie. ACS Photonics. 2023 Sep 21;10(10):3748-3754. doi: 10.1021/acsphotonics.3c00968. eCollection 2023 Oct 18. ACS Photonics. 2023. PMID: 37869559 Free PMC article.
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