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Thermal conductivity of amorphous Al2O3/TiO2 nanolaminates deposited by atomic layer deposition.
Nanotechnology. 2016 Nov 4;27(44):445704. doi: 10.1088/0957-4484/27/44/445704. Epub 2016 Sep 27.
Nanotechnology. 2016.
PMID: 27670821
Low-Temperature Plasma-Enhanced Atomic Layer Deposition of SiO2 Using Carbon Dioxide.
Zhu Z, Sippola P, Ylivaara OME, Modanese C, Di Sabatino M, Mizohata K, Merdes S, Lipsanen H, Savin H.
Zhu Z, et al. Among authors: ylivaara ome.
Nanoscale Res Lett. 2019 Feb 12;14(1):55. doi: 10.1186/s11671-019-2889-y.
Nanoscale Res Lett. 2019.
PMID: 30747362
Free PMC article.
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Saturation profile based conformality analysis for atomic layer deposition: aluminum oxide in lateral high-aspect-ratio channels.
Yim J , Ylivaara OME , Ylilammi M , Korpelainen V , Haimi E , Verkama E , Utriainen M , Puurunen RL .
Yim J , et al. Among authors: ylivaara ome.
Phys Chem Chem Phys. 2020 Oct 21;22(40):23107-23120. doi: 10.1039/d0cp03358h.
Phys Chem Chem Phys. 2020.
PMID: 33025987
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Microelectrode Array With Transparent ALD TiN Electrodes.
Ryynänen T, Pelkonen A, Grigoras K, Ylivaara OME, Hyvärinen T, Ahopelto J, Prunnila M, Narkilahti S, Lekkala J.
Ryynänen T, et al. Among authors: ylivaara ome.
Front Neurosci. 2019 Mar 22;13:226. doi: 10.3389/fnins.2019.00226. eCollection 2019.
Front Neurosci. 2019.
PMID: 30967754
Free PMC article.
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