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Saturation profile based conformality analysis for atomic layer deposition: aluminum oxide in lateral high-aspect-ratio channels.
Phys Chem Chem Phys. 2020 Oct 21;22(40):23107-23120. doi: 10.1039/d0cp03358h.
Phys Chem Chem Phys. 2020.
PMID: 33025987
Piezoelectric coefficients and spontaneous polarization of ScAlN.
Caro MA, Zhang S, Riekkinen T, Ylilammi M, Moram MA, Lopez-Acevedo O, Molarius J, Laurila T.
Caro MA, et al. Among authors: ylilammi m.
J Phys Condens Matter. 2015 Jun 24;27(24):245901. doi: 10.1088/0953-8984/27/24/245901. Epub 2015 May 22.
J Phys Condens Matter. 2015.
PMID: 26000892
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2-D modeling of laterally acoustically coupled thin film bulk acoustic wave resonator filters.
Pensala T, Meltaus J, Kokkonen K, Ylilammi M.
Pensala T, et al. Among authors: ylilammi m.
IEEE Trans Ultrason Ferroelectr Freq Control. 2010 Nov;57(11):2537-49. doi: 10.1109/TUFFC.2010.1720.
IEEE Trans Ultrason Ferroelectr Freq Control. 2010.
PMID: 21041141
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Spurious resonance suppression in gigahertz-range ZnO thin-film bulk acoustic wave resonators by the boundary frame method: modeling and experiment.
Pensala T, Ylilammi M.
Pensala T, et al. Among authors: ylilammi m.
IEEE Trans Ultrason Ferroelectr Freq Control. 2009 Aug;56(8):1731-44. doi: 10.1109/TUFFC.2009.1238.
IEEE Trans Ultrason Ferroelectr Freq Control. 2009.
PMID: 19686989
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Thin film bulk acoustic wave filter.
Ylilammi M, Ellä J, Partanen M, Kaitila J.
Ylilammi M, et al.
IEEE Trans Ultrason Ferroelectr Freq Control. 2002 Apr;49(4):535-9. doi: 10.1109/58.996574.
IEEE Trans Ultrason Ferroelectr Freq Control. 2002.
PMID: 11989711
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Numerical analysis of a theoretical one-dimensional amperometric enzyme sensor.
Ylilammi M, Lehtinen L.
Ylilammi M, et al.
Med Biol Eng Comput. 1988 Jan;26(1):81-7. doi: 10.1007/BF02441833.
Med Biol Eng Comput. 1988.
PMID: 3199905
No abstract available.
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