Interface Investigation on SiGe/Si Multilayer Structures: Influence of Different Epitaxial Process Conditions.
Kong Z, Song Y, Wang H, Liu X, Wang X, Liu J, Li B, Su J, Tan X, Luan Q, Lin H, Ren Y, Zhang Y, Liu J, Li J, Du A, Radamson HH, Zhao C, Ye T, Wang G.
Kong Z, et al. Among authors: ye t.
ACS Appl Mater Interfaces. 2023 Dec 6;15(48):56567-56574. doi: 10.1021/acsami.3c14168. Epub 2023 Nov 21.
ACS Appl Mater Interfaces. 2023.
PMID: 37988059