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A Highly Sensitive and High-Resolution Resonant MEMS Electrostatic Field Microsensor Based on Electrostatic Stiffness Perturbation.
Micromachines (Basel). 2023 Jul 25;14(8):1489. doi: 10.3390/mi14081489.
Micromachines (Basel). 2023.
PMID: 37630029
Free PMC article.
Wafer-Level Vacuum-Packaged Electric Field Microsensor: Structure Design, Theoretical Model, Microfabrication, and Characterization.
Liu J, Xia S, Peng C, Wu Z, Chu Z, Zhang Z, Lei H, Zheng F, Zhang W.
Liu J, et al.
Micromachines (Basel). 2022 Jun 11;13(6):928. doi: 10.3390/mi13060928.
Micromachines (Basel). 2022.
PMID: 35744542
Free PMC article.
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