A miniaturized ECR plasma flood gun for wafer charge neutralization.
Jiang Y, Peng S, Wu W, Ma T, Zhang J, Ren H, Li K, Zhang T, Wen J, Xu Y, Zhang A, Sun J, Guo Z, Chen J.
Jiang Y, et al.
Rev Sci Instrum. 2020 Mar 1;91(3):033319. doi: 10.1063/1.5128522.
Rev Sci Instrum. 2020.
PMID: 32259944