Novel resonant pressure sensor based on piezoresistive detection and symmetrical in-plane mode vibration.
Han X, Mao Q, Zhao L, Li X, Wang L, Yang P, Lu D, Wang Y, Yan X, Wang S, Zhu N, Jiang Z.
Han X, et al. Among authors: wang l, wang y, wang s.
Microsyst Nanoeng. 2020 Nov 16;6:95. doi: 10.1038/s41378-020-00207-0. eCollection 2020.
Microsyst Nanoeng. 2020.
PMID: 34567705
Free PMC article.