Investigation on Recrystallization Channel for Vertical C-Shaped-Channel Nanosheet FETs by Laser Annealing.
Chen Z, Zhu H, Wang G, Wang Q, Xiao Z, Zhang Y, Liu J, Lu S, Du Y, Yu J, Xiong W, Kong Z, Du A, Yan Z, Zheng Y.
Chen Z, et al. Among authors: wang g, wang q.
Nanomaterials (Basel). 2023 Jun 1;13(11):1786. doi: 10.3390/nano13111786.
Nanomaterials (Basel). 2023.
PMID: 37299689
Free PMC article.