Mixed-Substituted Single-Source Precursors for Si1-xGex Thin Film Deposition.
Köstler B, Jungwirth F, Achenbach L, Sistani M, Bolte M, Lerner HW, Albert P, Wagner M, Barth S.
Köstler B, et al. Among authors: wagner m.
Inorg Chem. 2022 Oct 31;61(43):17248-17255. doi: 10.1021/acs.inorgchem.2c02835. Epub 2022 Oct 19.
Inorg Chem. 2022.
PMID: 36260357
Free PMC article.