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Probing Electrified Liquid-Solid Interfaces with Scanning Electron Microscopy.
Guo H, Yulaev A, Strelcov E, Tselev A, Arble C, Vladar AE, Villarrubia JS, Kolmakov A. Guo H, et al. Among authors: vladar ae. ACS Appl Mater Interfaces. 2020 Dec 16;12(50):56650-56657. doi: 10.1021/acsami.0c19634. Epub 2020 Dec 2. ACS Appl Mater Interfaces. 2020. PMID: 33327058
Metrology for the next generation of semiconductor devices.
Orji NG, Badaroglu M, Barnes BM, Beitia C, Bunday BD, Celano U, Kline RJ, Neisser M, Obeng Y, Vladar AE. Orji NG, et al. Among authors: vladar ae. Nat Electron. 2018;1:10.1038/s41928-018-0150-9. doi: 10.1038/s41928-018-0150-9. Nat Electron. 2018. PMID: 31276101 Free PMC article.
Electron beam-based metrology after CMOS.
Liddle JA, Hoskins BD, Vladár AE, Villarrubia JS. Liddle JA, et al. Among authors: vladar ae. APL Mater. 2018;6:10.1063/1.5038249. doi: 10.1063/1.5038249. APL Mater. 2018. PMID: 30984475 Free PMC article.
38 results