Micro 3D printing of a functional MEMS accelerometer.
Pagliano S, Marschner DE, Maillard D, Ehrmann N, Stemme G, Braun S, Villanueva LG, Niklaus F.
Pagliano S, et al. Among authors: villanueva lg.
Microsyst Nanoeng. 2022 Sep 19;8:105. doi: 10.1038/s41378-022-00440-9. eCollection 2022.
Microsyst Nanoeng. 2022.
PMID: 36133693
Free PMC article.