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Aluminum doped zinc oxide deposited by atomic layer deposition and its applications to micro/nano devices.
Sci Rep. 2021 Jan 13;11(1):1204. doi: 10.1038/s41598-020-80880-3.
Sci Rep. 2021.
PMID: 33441961
Free PMC article.
Micro-Fabricated Presure Sensor Using 50 nm-Thick of Pd-Based Metallic Glass Freestanding Membrane.
Van Toan N, Tuoi TTK, Tsai YC, Lin YC, Ono T.
Van Toan N, et al. Among authors: tuoi ttk.
Sci Rep. 2020 Jun 22;10(1):10108. doi: 10.1038/s41598-020-67150-y.
Sci Rep. 2020.
PMID: 32572097
Free PMC article.
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