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Heavily-Doped Bulk Silicon Sidewall Electrodes Embedded between Free-Hanging Microfluidic Channels by Modified Surface Channel Technology.
Micromachines (Basel). 2020 May 31;11(6):561. doi: 10.3390/mi11060561.
Micromachines (Basel). 2020.
PMID: 32486348
Free PMC article.
μ-Coriolis Mass Flow Sensor with Resistive Readout.
Schut T, Wiegerink R, Lötters J.
Schut T, et al.
Micromachines (Basel). 2020 Feb 11;11(2):184. doi: 10.3390/mi11020184.
Micromachines (Basel). 2020.
PMID: 32053956
Free PMC article.
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