Rhenium ion beam for implantation into semiconductors.
Kulevoy TV, Gerasimenko NN, Seleznev DN, Fedorov PA, Temirov AA, Alyoshin ME, Kraevsky SV, Smirnov DI, Yakushin PE, Khoroshilov VV.
Kulevoy TV, et al. Among authors: temirov aa.
Rev Sci Instrum. 2012 Feb;83(2):02B913. doi: 10.1063/1.3673632.
Rev Sci Instrum. 2012.
PMID: 22380345