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Low-loss silicon nitride photonic ICs for near-infrared wavelength bandwidth.
Opt Express. 2023 May 8;31(10):16227-16242. doi: 10.1364/OE.477458.
Opt Express. 2023.
PMID: 37157706
Free article.
Deep multilevel wet etching of fused silica glass microstructures in BOE solution.
Konstantinova TG, Andronic MM, Baklykov DA, Stukalova VE, Ezenkova DA, Zikiy EV, Bashinova MV, Solovev AA, Lotkov ES, Ryzhikov IA, Rodionov IA.
Konstantinova TG, et al. Among authors: stukalova ve.
Sci Rep. 2023 Mar 30;13(1):5228. doi: 10.1038/s41598-023-32503-w.
Sci Rep. 2023.
PMID: 36997654
Free PMC article.
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