The push-pull principle: an electrostatic actuator concept for low distortion acoustic transducers.
Kaiser B, Schenk HAG, Ehrig L, Wall F, Monsalve JM, Langa S, Stolz M, Melnikov A, Conrad H, Schuffenhauer D, Schenk H.
Kaiser B, et al. Among authors: stolz m.
Microsyst Nanoeng. 2022 Nov 30;8:125. doi: 10.1038/s41378-022-00458-z. eCollection 2022.
Microsyst Nanoeng. 2022.
PMID: 36465157
Free PMC article.