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stephan kratzsch
(2 results)?
Inhibition of Crystal Growth during Plasma Enhanced Atomic Layer Deposition by Applying BIAS.
Materials (Basel). 2015 Nov 18;8(11):7805-7812. doi: 10.3390/ma8115425.
Materials (Basel). 2015.
PMID: 28793679
Free PMC article.
Encapsulation process for diffraction gratings.
Ratzsch S, Kley EB, Tünnermann A, Szeghalmi A.
Ratzsch S, et al.
Opt Express. 2015 Jul 13;23(14):17955-65. doi: 10.1364/OE.23.017955.
Opt Express. 2015.
PMID: 26191855
Free article.
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Influence of the oxygen plasma parameters on the atomic layer deposition of titanium dioxide.
Ratzsch S, Kley EB, Tünnermann A, Szeghalmi A.
Ratzsch S, et al.
Nanotechnology. 2015 Jan 16;26(2):024003. doi: 10.1088/0957-4484/26/2/024003. Epub 2014 Dec 19.
Nanotechnology. 2015.
PMID: 25525676
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