An Electrostatic MEMS Roll-Pitch Rotation Rate Sensor with In-Plane Drive Mode.
Khaled A, Salman AM, Aljehani NS, Alzahem IF, Almikhlafi RS, Noor RM, Seddiq YM, Alghamdi MS, Soliman M, Mahmoud MAE.
Khaled A, et al. Among authors: soliman m.
Sensors (Basel). 2022 Jan 18;22(3):702. doi: 10.3390/s22030702.
Sensors (Basel). 2022.
PMID: 35161449
Free PMC article.