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Plasma-Assisted Nanofabrication: The Potential and Challenges in Atomic Layer Deposition and Etching.
Nanomaterials (Basel). 2022 Oct 6;12(19):3497. doi: 10.3390/nano12193497.
Nanomaterials (Basel). 2022.
PMID: 36234624
Free PMC article.
Review.
Effect of Plasma-Enhanced Atomic Layer Deposition on Oxygen Overabundance and Its Influence on the Morphological, Optical, Structural, and Mechanical Properties of Al-Doped TiO2 Coating.
Chiappim W, Testoni G, Miranda F, Fraga M, Furlan H, Saravia DA, Sobrinho ADS, Petraconi G, Maciel H, Pessoa R.
Chiappim W, et al. Among authors: sobrinho ads.
Micromachines (Basel). 2021 May 21;12(6):588. doi: 10.3390/mi12060588.
Micromachines (Basel). 2021.
PMID: 34063804
Free PMC article.
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