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Effect of an electric field during the deposition of silicon dioxide thin films by plasma enhanced atomic layer deposition: an experimental and computational study.
Beladiya V , Becker M , Faraz T , Kessels WMME , Schenk P , Otto F , Fritz T , Gruenewald M , Helbing C , Jandt KD , Tünnermann A , Sierka M , Szeghalmi A . Beladiya V , et al. Among authors: sierka m. Nanoscale. 2020 Jan 23;12(3):2089-2102. doi: 10.1039/c9nr07202k. Nanoscale. 2020. PMID: 31912855
Structure evolution of nanoparticulate Fe2O3.
Erlebach A, Kurland HD, Grabow J, Müller FA, Sierka M. Erlebach A, et al. Among authors: sierka m. Nanoscale. 2015 Feb 21;7(7):2960-9. doi: 10.1039/c4nr06989g. Nanoscale. 2015. PMID: 25587689
77 results