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seong ju won
(3 results)?
Extreme ultraviolet pellicle wrinkles influence on mask 3D effects: experimental demonstration.
Appl Opt. 2023 Aug 20;62(24):6307-6315. doi: 10.1364/AO.495649.
Appl Opt. 2023.
PMID: 37706820
Study on ZrSi2 as a Candidate Material for Extreme Ultraviolet Pellicles.
Wi SJ, Kim WJ, Kim H, Jeong D, Lee DG, Choi J, Cho SJ, Yu L, Ahn J.
Wi SJ, et al.
Membranes (Basel). 2023 Aug 14;13(8):731. doi: 10.3390/membranes13080731.
Membranes (Basel). 2023.
PMID: 37623792
Free PMC article.
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Investigating the Degradation of EUV Transmittance of an EUV Pellicle Membrane.
Wi SJ, Jang YJ, Lee DG, Kim SY, Ahn J.
Wi SJ, et al.
Membranes (Basel). 2022 Dec 21;13(1):5. doi: 10.3390/membranes13010005.
Membranes (Basel). 2022.
PMID: 36676812
Free PMC article.
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Investigation of the Resistivity and Emissivity of a Pellicle Membrane for EUV Lithography.
Wi SJ, Jang YJ, Kim H, Cho K, Ahn J.
Wi SJ, et al.
Membranes (Basel). 2022 Mar 26;12(4):367. doi: 10.3390/membranes12040367.
Membranes (Basel). 2022.
PMID: 35448337
Free PMC article.
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