High numerical aperture Hartmann wave front sensor for extreme ultraviolet spectral range.
Li L, Koliyadu JCP, Donnelly H, Alj D, Delmas O, Ruiz-Lopez M, de La Rochefoucauld O, Dovillaire G, Fajardo M, Zhou C, Ruan S, Dromey B, Zepf M, Zeitoun P.
Li L, et al. Among authors: ruan s.
Opt Lett. 2020 Aug 1;45(15):4248-4251. doi: 10.1364/OL.396356.
Opt Lett. 2020.
PMID: 32735269