Biaxial Piezoelectric MEMS Mirrors with Low Absorption Coating for 1550 nm Long-Range LIDAR.
Mollard L, Riu J, Royo S, Dieppedale C, Hamelin A, Koumela A, Verdot T, Frey L, Le Rhun G, Castellan G, Licitra C.
Mollard L, et al. Among authors: royo s.
Micromachines (Basel). 2023 May 9;14(5):1019. doi: 10.3390/mi14051019.
Micromachines (Basel). 2023.
PMID: 37241642
Free PMC article.