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Design and Demonstration of a Microelectromechanical System Single-Ring Resonator with Inner Ring-Shaped Spring Supports for Inertial Sensors.
Sensors (Basel). 2023 Nov 16;23(22):9234. doi: 10.3390/s23229234.
Sensors (Basel). 2023.
PMID: 38005620
Free PMC article.
Recent Advances in MEMS-Based 3D Hemispherical Resonator Gyroscope (HRG)-A Sensor of Choice.
Ranji AR, Damodaran V, Li K, Chen Z, Alirezaee S, Ahamed MJ.
Ranji AR, et al.
Micromachines (Basel). 2022 Oct 5;13(10):1676. doi: 10.3390/mi13101676.
Micromachines (Basel). 2022.
PMID: 36296029
Free PMC article.
Review.
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