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Effect of Conditioner Type and Downforce, and Pad Surface Micro-Texture on SiO2 Chemical Mechanical Planarization Performance.
Micromachines (Basel). 2019 Apr 18;10(4):258. doi: 10.3390/mi10040258.
Micromachines (Basel). 2019.
PMID: 31003465
Free PMC article.
Chemical Mechanical Planarization and Old Italian Violins.
Philipossian A, Sampurno Y, Peckler L.
Philipossian A, et al.
Micromachines (Basel). 2018 Jan 18;9(1):37. doi: 10.3390/mi9010037.
Micromachines (Basel). 2018.
PMID: 30393312
Free PMC article.
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Characterization of CMP Slurries Using Densitometry and Refractive Index Measurements.
Vazquez Bengochea L, Sampurno Y, Kavaljer M, Johnston R, Philipossian A.
Vazquez Bengochea L, et al. Among authors: philipossian a.
Micromachines (Basel). 2018 Oct 24;9(11):542. doi: 10.3390/mi9110542.
Micromachines (Basel). 2018.
PMID: 30715041
Free PMC article.
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