Cantilever bending based on humidity-actuated mesoporous silica/silicon bilayers.
Ganser C, Fritz-Popovski G, Morak R, Sharifi P, Marmiroli B, Sartori B, Amenitsch H, Griesser T, Teichert C, Paris O.
Ganser C, et al. Among authors: paris o.
Beilstein J Nanotechnol. 2016 Apr 28;7:637-44. doi: 10.3762/bjnano.7.56. eCollection 2016.
Beilstein J Nanotechnol. 2016.
PMID: 27335753
Free PMC article.